Ceramic thin film thermocouples for SiC-based ceramic matrix composites

被引：57
|
作者：
Wrbanek, John D. [1 ]
Fralick, Gustave C. [1 ]
Zhu, Dongming [1 ]
机构：
[1] NASA, Glenn Res Ctr, Cleveland, OH 44135 USA
来源：
THIN SOLID FILMS | 2012年 / 520卷 / 17期
关键词：
Thermocouples; Thin films; Indium oxides; Zinc oxides; Ceramic matrix composites; High temperature environments; RESISTIVITY; COATINGS; MULLITE;
D O I：
10.1016/j.tsf.2012.04.034
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Conductive ceramic thin film thermocouples were investigated for application to silicon carbide fiber reinforced silicon carbide ceramic matrix composite (SiC/SiC CMC) components. High temperature conductive oxides based on indium and zinc oxides were selected for testing to high temperatures in air. Sample oxide films were first sputtered-deposited on alumina substrates then on SiC/SiC CMC sample disks. Operational issues such as cold junction compensation to a 0 degrees C reference, resistivity and thermopower variations are discussed. Results show that zinc oxides have an extremely high resistance and thus increased complexity for use as a thermocouple, but thermocouples using indium oxides can achieve a strong, nearly linear response to high temperatures. Published by Elsevier B.V.
引用
收藏
页码：5801 / 5806
页数：6
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