Direct and Iterative Inverse Wave Scattering Methods for Time-Harmonic Far-Field Profilometry

被引:0
|
作者
Alwakil, A. [1 ]
Soriano, G. [1 ]
Belkebir, K. [1 ]
Giovannini, H. [1 ]
Arhab, S. [2 ]
机构
[1] Aix Marseille Univ, CNRS, UMR7249, Cent Marseille,Inst Fresnel, F-13013 Marseille, France
[2] Univ Paris 11, Lab Signaux & Syst, CNRS, SUPELEC,UMR8506, Paris, France
关键词
RANDOM ROUGH SURFACES; LOW-GRAZING ANGLES; KIRCHHOFF APPROXIMATION; ELECTROMAGNETIC-WAVES; OPTICAL PROFILOMETRY; RECONSTRUCTION; PROFILES;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A direct inversion method and two iterative schemes based on a numerical solution of the rigorous forward surface scattering problem are tested and compared for the profilometry of a very rough metallic surface in a context of sparse data.
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页数:4
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