BORON-BASED THIN LAYERS DEPOSITED BY RF PLASMA JET WITH SLIT NOZZLE

被引：0

作者：

Pijakova, B. ^{[1
]}

Alberti, M. ^{[1
]}

Klima, M. ^{[1
]}

机构：

[1] Masaryk Univ, Dept Phys Elect, 267-2 Kotlarska, CZ-61137 Brno, Czech Republic

来源：

HAKONE XV: INTERNATIONAL SYMPOSIUM ON HIGH PRESSURE LOW TEMPERATURE PLASMA CHEMISTRY: WITH JOINT COST TD1208 WORKSHOP: NON-EQUILIBRIUM PLASMAS WITH LIQUIDS FOR WATER AND SURFACE TREATMENT | 2016年

关键词：

friction coefficient; RF plasma jet; trimethyl borate; FILMS;

D O I：

暂无

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

An atmospheric pressure slit plasma jet system was used to prepare thin layers using trimethyl borate. Organic precursor was introduced to plasma in a form of vapor. Observation of produced layers was focused on chemical composition, surface structure and friction coefficient measurements. Smooth surface exhibits low RMS roughness and friction coefficient of 0.05, enabling the potential industrial application.

引用

页码：326 / 329

页数：4

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