Deposition and etching of HMDSO/SF6 plasma polymerized thin films.

被引：0
|
作者：
Santana, RG [1 ]
Honda, RY [1 ]
Algatti, MA [1 ]
Kayama, ME [1 ]
Mota, RP [1 ]
机构：
[1] UNIV ESTADUAL PAULISTA,BR-12500000 GUARATINGUETA,SP,BRAZIL
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1997年 / 213卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：456 / POLY
页数：1
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