Amino-containing polymers for water soluble electron-beam resist.

被引：0
|
作者：
Nagasaki, Y [1 ]
Sato, Y [1 ]
Kato, M [1 ]
机构：
[1] Sci Univ Tokyo, Dept Mat Sci, Noda, Chiba 2788510, Japan
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1999年 / 218卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
47-PMSE
引用
收藏
页码：U616 / U616
页数：1
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