Deposition of highly oriented (K,Na)NbO3 films on flexible metal substrates

被引:13
|
作者
Grivel, Jean-Claude [1 ]
Thyden, Karl [1 ]
Bowen, Jacob R. [1 ]
Haugen, Astri Bjornetun [1 ]
机构
[1] Tech Univ Denmark, Dept Energy Convers & Storage, Frederiksborgvej 399, DK-4000 Roskilde, Denmark
关键词
Piezoelectric materials; Thin films; Sol-gel preparation; Texture; THIN-FILMS;
D O I
10.1016/j.tsf.2018.02.008
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In view of developing flexible, highly textured Pb-free piezoelectric thin films, (K,Na)NbO3 was deposited by chemical solution deposition on cube-textured Ni-W alloy substrates. After heat treatment, a strong (001()pc) out-of-plane preferential orientation is created in the (K,Na)NbO3 layer, which also exhibits a sharp in-plane texture with 45 degrees-rotated epitaxial relation to the substrate. The microstructure of the film is strongly dependent on the heat treatment temperature; sub-micrometer grains versus up to 2 mu m long particles forming at 600 degrees C and 900 degrees C respectively. K4Nb6O17 and (K1-xNax)(2)Nb4O11 impurity phases were identified depending on the processing temperature.
引用
收藏
页码:7 / 10
页数:4
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