Deposition of highly oriented (K,Na)NbO3 films on flexible metal substrates

被引：13

作者：

Grivel, Jean-Claude ^{[1
]}

Thyden, Karl ^{[1
]}

Bowen, Jacob R. ^{[1
]}

Haugen, Astri Bjornetun ^{[1
]}

机构：

[1] Tech Univ Denmark, Dept Energy Convers & Storage, Frederiksborgvej 399, DK-4000 Roskilde, Denmark

来源：

THIN SOLID FILMS | 2018年 / 650卷

关键词：

Piezoelectric materials; Thin films; Sol-gel preparation; Texture; THIN-FILMS;

D O I：

10.1016/j.tsf.2018.02.008

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In view of developing flexible, highly textured Pb-free piezoelectric thin films, (K,Na)NbO3 was deposited by chemical solution deposition on cube-textured Ni-W alloy substrates. After heat treatment, a strong (001()pc) out-of-plane preferential orientation is created in the (K,Na)NbO3 layer, which also exhibits a sharp in-plane texture with 45 degrees-rotated epitaxial relation to the substrate. The microstructure of the film is strongly dependent on the heat treatment temperature; sub-micrometer grains versus up to 2 mu m long particles forming at 600 degrees C and 900 degrees C respectively. K4Nb6O17 and (K1-xNax)(2)Nb4O11 impurity phases were identified depending on the processing temperature.

引用

页码：7 / 10

页数：4

共 50 条

[1] Highly oriented La doped (K, Na)NbO3 ferroelectric thin films
Vendrell, X.
Mestres, L.
Raymond, O.
Ochoa, D. A.
Garcia, J. E.
2012 INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS HELD JOINTLY WITH 11TH IEEE ECAPD AND IEEE PFM (ISAF/ECAPD/PFM), 2012,
[2] Deposition of orientation-controlled thick (K,Na)NbO3 films on metal substrates by repeated hydrothermal deposition technique
Ito, Yoshiharu
Tateyama, Akinori
Nakamura, Yoshiko
Shimizu, Takao
Kurosawa, Minoru
Uchida, Hiroshi
Shiraishi, Takahisa
Kiguchi, Takanori
Konno, Toyohiko J.
Ishikawa, Mutsuo
Funakubo, Hiroshi
JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2019, 127 (07) : 478 - 484
[3] c-axis oriented (Na,K)NbO3 thin films on Si substrates using metalorganic chemical vapor deposition
Cho, CR
MATERIALS LETTERS, 2002, 57 (04) : 781 - 786
[4] Processing of highly oriented (K,Na)NbO3 thin films using a tailored metal-alkoxide precursor solution
Nakashima, Yoshifumi
Sakamoto, Wataru
Yogo, Toshinobu
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2011, 31 (14) : 2497 - 2503
[5] Vibration-energy-harvesting properties of hydrothermally synthesized (K,Na)NbO3 films deposited on flexible metal foil substrates
Shiraishi, Takahisa
Kaneko, Noriyuki
Kurosawa, Minoru
Uchida, Hiroshi
Suzuki, Yasuhiro
Kobayashi, Takeshi
Funakubo, Hiroshi
JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (10)
[6] (Na,K)NbO3 thin films using metal-organic chemical vapor deposition
Cho, CR
Moon, BM
INTEGRATED FERROELECTRICS, 2002, 45 : 39 - 48
[7] Ferroelectric and piezoelectric properties of (K,Na)NbO3 thick films prepared on metal substrates by hydrothermal method
Shiraishi, Takahisa
Einishi, Hiro
Yasui, Shintaro
Funakubo, Hiroshi
Hasegawa, Tomohito
Kurosawa, Minoru
Ishikawa, Mutsuo
Uchida, Hiroshi
Sakashita, Yukio
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2013, 62 (07) : 1055 - 1059
[8] Ferroelectric and piezoelectric properties of (K,Na)NbO3 thick films prepared on metal substrates by hydrothermal method
Takahisa Shiraishi
Hiro Einishi
Shintaro Yasui
Hiroshi Funakubo
Tomohito Hasegawa
Minoru Kurosawa
Mutsuo Ishikawa
Hiroshi Uchida
Yukio Sakashita
Journal of the Korean Physical Society, 2013, 62 : 1055 - 1059
[9] Growth and physical properties of highly oriented La-doped (K,Na)NbO3 ferroelectric thin films
Vendrell, X.
Raymond, O.
Ochoa, D. A.
Garcia, J. E.
Mestres, L.
THIN SOLID FILMS, 2015, 577 : 35 - 41
[10] Fabrication of (K,Na)NbO3 films on SrRuO3/(001)SrTiO3 substrates by pulsed laser deposition
Fujii, Ichiro
Tagata, Saori
Nakao, Tomohiro
Koyama, Natsuki
Adachi, Hideaki
Wada, Takahiro
JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (10)

← 1 2 3 4 5 →