A Rapid Prototyping Technique for Microfluidics with High Robustness and Flexibility

被引:10
|
作者
Liu, Zhenhua [1 ]
Xu, Wenchao [1 ]
Hou, Zining [1 ]
Wu, Zhigang [1 ,2 ]
机构
[1] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China
[2] Uppsala Univ, Angstrom Lab, Microsyst Technol, Dept Engn Sci, S-75121 Uppsala, Sweden
基金
中国国家自然科学基金;
关键词
prototyping technique; microfluidics; soft lithography; ultraviolet (UV) laser direct writing; DRY FILM PHOTORESIST; ON-A-CHIP; SOFT-LITHOGRAPHY; FABRICATION TECHNIQUES; DEVICES; MASTERS; SU-8; PRESSURE; SYSTEM; MOLD;
D O I
10.3390/mi7110201
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In microfluidic device prototyping, master fabrication by traditional photolithography is expensive and time-consuming, especially when the design requires being repeatedly modified to achieve a satisfactory performance. By introducing a high-performance/cost-ratio laser to the traditional soft lithography, this paper describes a flexible and rapid prototyping technique for microfluidics. An ultraviolet (UV) laser directly writes on the photoresist without a photomask, which is suitable for master fabrication. By eliminating the constraints of fixed patterns in the traditional photomask when the masters are made, this prototyping technique gives designers/researchers the convenience to revise or modify their designs iteratively. A device fabricated by this method is tested for particle separation and demonstrates good properties. This technique provides a flexible and rapid solution to fabricating microfluidic devices for non-professionals at relatively low cost.
引用
收藏
页数:13
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