Synthesis of silver nanoparticles by chemical reduction method and its metal induced crystallization of poly-Si thin film application

被引：0

作者：

Huang, Jung-Jie ^{[1
]}

Lin, Che-Chun ^{[2
]}

Wuu, Dong-Sing ^{[2
]}

机构：

[1] Dayeh Univ, Dept Ind Engn & Management, 168 Univ Rd, Changhua, Taiwan

[2] Natl Chung Hsing Univ, Dept Mat Sci & Engn, 250 Kuo Kuang Rd, Taichung, Taiwan

来源：

MATERIALS RESEARCH EXPRESS | 2014年 / 1卷 / 04期

关键词：

metal-induced crystallization; Ag nanoparticle; poly-Si film; INDUCED LATERAL CRYSTALLIZATION; AMORPHOUS-SILICON; LEAKAGE CURRENT; TFTS;

D O I：

10.1088/2053-1591/1/4/046401

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Metal induced crystallization (MIC) can be generated by using a silver nanoparticles (AgNPs) solution spin coated on amorphous silicon (a-Si) film, and annealing the sample in a furnace under vacuum. Because nanoscale metal has a large specific surface area, its catalytic effect is enhanced, resulting in a low processing temperature. Thus, a poly-Si thin film with a high crystalline fraction can be obtained by using AgNPs induced crystallization. In this study, the size and annealing time of AgNPs are discussed. According to the results, the grain size of the poly-Si thin film produced using AgNPs induced crystallization was more uniform than that of the film obtained by employing traditional thermally evaporated Ag induced crystallization. Smaller AgNPs size and long annealing time enhance the crystallization of poly-Si thin film. Applying an annealing temperature of 550 degrees C for 480 min with 10 nm of AgNPs yielded a crystalline fraction of 75%.

引用

页数：15

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