Impact of Low-Temperature Coolcube™ Process on the Performance of FDSOI Tunnel FETs

被引：0

作者：

Diaz-Llorente, C. ^{[1
]}

Colinge, J. -P. ^{[1
]}

Le Royer, C. ^{[1
]}

Vinet, M. ^{[1
]}

Theodorou, C. G. ^{[2
]}

Cristoloveanu, S. ^{[2
]}

Ghibaudo, G. ^{[2
]}

机构：

[1] Univ Grenoble Alpes, CEA, LETI, Grenoble, France

[2] Univ Grenoble Alpes, INP, Minatec, IMEP,LaHC, Grenoble, France

来源：

2018 IEEE SOI-3D-SUBTHRESHOLD MICROELECTRONICS TECHNOLOGY UNIFIED CONFERENCE (S3S) | 2018年

关键词：

Tunnel FET; TFET; charge pumping; noise measurement; trap-assisted tunneling; TAT; ELECTRICAL NOISE;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Tunnel FETs fabricated using the low-temperature CoolCube (TM) process are compared with devices made with standard high-temperature (HT) technology. Charge pumping (CP) and low-frequency noise (LFN) measurements were performed to evaluate the impact of low-temperature (LT) process on the device performance. LT devices feature a higher density of source/drain junction defects, due to lower thermal budget, causing higher levels of LFN. These defects enhance the trap-assisted tunneling (TAT) current which is further amplified by the more abrupt junctions obtained using LT processing.

引用

页数：3

共 50 条

[31] EFFECT OF DISSIPATION ON LOW-TEMPERATURE PROPERTIES OF TUNNEL JUNCTION CHAIN
KORSHUNOV, SE
ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI, 1989, 95 (03): : 1058 - 1075
[32] LOW-TEMPERATURE RELAXATION OF AN ANISOTROPIC SEMICLASSICAL SPIN - TUNNEL FLIPPING
IOSELEVICH, AS
JETP LETTERS, 1987, 45 (09) : 570 - 574
[33] LOW-TEMPERATURE PROPERTIES OF TUNNEL-JUNCTIONS WITH AN AMORPHOUS LAYER
KOZUB, VI
ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI, 1984, 86 (06): : 2239 - 2254
[34] Fabrication and Low-Temperature Characterization of Phthalocyanine Molecular Tunnel Heterojunctions
Jiang, Xuanyuan
Brooks, Andrew
Liu, Shuanglong
Koptur-Palenchar, John
Quan, Yundi
Hennig, Richard G.
Cheng, Hai-Ping
Zhang, Xiaoguang
Hebard, Arthur F.
JOURNAL OF PHYSICAL CHEMISTRY C, 2023, 127 (35): : 17473 - 17481
[35] LOW-TEMPERATURE OXIDATION PROCESS FOR RECOVERY OF BITUMEN
CRAM, PJ
REDFORD, DA
JOURNAL OF CANADIAN PETROLEUM TECHNOLOGY, 1977, 16 (03): : 72 - 83
[36] Low-temperature smectite illitization as a biomineral process
Krinari, GA
Khramchenkov, MG
DOKLADY EARTH SCIENCES, 2005, 403 (06) : 926 - 930
[37] Low-temperature purification process of metallurgical silicon
Zhao Li-xin
Wang Zhi
Guo Zhan-cheng
Li Cheng-yi
TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA, 2011, 21 (05) : 1185 - 1192
[38] LOW-TEMPERATURE THERMAL PROCESS FOR DECOMPOSITION OF WATER
ABRAHAM, BM
SCHREINER, F
SCIENCE, 1973, 180 (4089) : 959 - 960
[39] TOSCOAL PROCESS FOR LOW-TEMPERATURE PYROLYSIS OF COAL
CARLSON, FB
YARDUMIA.LH
ATWOOD, MT
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1973, : 17 - &
[40] ALUMINA CATALYSTS IN LOW-TEMPERATURE CLAUS PROCESS
PEARSON, MJ
INDUSTRIAL & ENGINEERING CHEMISTRY PRODUCT RESEARCH AND DEVELOPMENT, 1977, 16 (02): : 154 - 158

← 1 2 3 4 5 →