Roll-to-roll pilot nanoimprinting process for backlight devices

被引:18
|
作者
Makela, Tapio [1 ]
Haatainen, Tomi [1 ]
机构
[1] VTT, VTT Microsyst & Nanoelect, FIN-02044 Espoo, Finland
关键词
Roll-to-roll; Nanoimprinting; Hot embossing; Backlight; PMMA; LITHOGRAPHY; FABRICATION;
D O I
10.1016/j.mee.2012.03.031
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A pilot scale roll-to-roll manufacturing process for backlight devices was demonstrated using Poly(methyl methacrylate) (PMMA) film. Backlight device (28 x 28) mm(2) consist more than 78,000 binary elements with different orientation. Each element has 40 trenches with 5 mu m width and 1.3 mu m thick, totally 3.1 million trenches in one device. These devices can be used for display illumination in various applications when three LED is connected on the other end of the device. More than 1000 device was printed on 50 mm wide 375 mu m thick PMMA web using custom made nanoimprinting equipment. These devices demonstrate a high throughput and a low cost production possibility for micron- and submicron optical structures. The printed patterns were analysed by using optical microscopy, atomic force microscopy (AFM) and confocal microscopy. The backlight device after LED integration was characterized using luminescence measurements. The three surface mounted LED is connect to the upper side of printed PMMA device to give light in the polymer film. To collect statistics, every 50th sample was analysed. The pattern replication is good and the depth of the imprinted structure is typically in the range of 1.2-1.4 mu m when limits for working device is ca. 1.0 mu m. The optical properties of the analysed devices show good homogeneity inside one device. The standard deviation for the measured luminescence values for all devices was within 17% which is still acceptable for final production. No drastic wearing of the stamp can be seen after pilot manufacturing. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:89 / 91
页数:3
相关论文
共 50 条
  • [21] A vacuum roll-to-roll process for manufacturing OLEDs
    Thompson, MJ
    SOLID STATE TECHNOLOGY, 2004, 47 (05) : 30 - +
  • [22] Roll-to-roll fabricated lab-on-a-chip devices
    Vig, Asger Laurberg
    Makela, Tapio
    Majander, Paivi
    Lambertini, Vito
    Ahopelto, Jouni
    Kristensen, Andrs
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (03)
  • [23] Roll-to-roll printed gratings in cellulose acetate web using novel nanoimprinting device
    Makela, Tapio
    Haatainen, Tomi
    Ahopelto, Jouni
    MICROELECTRONIC ENGINEERING, 2011, 88 (08) : 2045 - 2047
  • [24] Roll-to-roll UV embossing process applied for light bar-based sub-wavelength gratings for backlight
    Liu, Chun-Wei
    Lee, Chi-Hung
    Lin, Shih-Chieh
    JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 2012, 20 (12) : 646 - 652
  • [25] Controlled airbrush coating of polymer resists in Roll-to-Roll nanoimprinting with regimented residual layer thickness
    Koo, Sungkwan
    Lee, Sung Ho
    Kim, Jeong Dae
    Hong, Jung Goo
    Baac, Hyoung Won
    Kwak, Moon Kyu
    Ok, Jong G.
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2016, 17 (07) : 943 - 947
  • [26] Finite Element Simulations of Filling and Demolding in Roll-to-Roll UV Nanoimprinting of Micro- and Nanopatterns
    Goetz, Johannes
    Rueda, Asier Alvarez
    Ruttloff, Stephan
    Kuna, Ladislav
    Belegratis, Maria
    Palfinger, Ursula
    Nees, Dieter
    Hartmann, Paul
    Stadlober, Barbara
    ACS APPLIED NANO MATERIALS, 2022, 5 (03) : 3434 - 3449
  • [27] Controlled airbrush coating of polymer resists in Roll-to-Roll nanoimprinting with regimented residual layer thickness
    Sungkwan Koo
    Sung Ho Lee
    Jeong Dae Kim
    Jung Goo Hong
    Hyoung Won Baac
    Moon Kyu Kwak
    Jong G. Ok
    International Journal of Precision Engineering and Manufacturing, 2016, 17 : 943 - 947
  • [28] Application of Calendering Process to Roll-to-Roll Printed Electronics
    Lee, Sangyoon
    Duc, Nguyen Ho Anh
    Hoang, Nguyen
    EQUIPMENT MANUFACTURING TECHNOLOGY AND AUTOMATION, PTS 1-3, 2011, 317-319 : 436 - 439
  • [29] Process Study on Roll-to-Roll Ultraviolet (UV) Embossing
    Shan, X. C.
    Yu, Voytekunas V.
    Mohaime, M.
    Zhong, Z. W.
    Wong, S. J.
    Lau, S. K.
    Lin, W. J.
    Lu, C. W.
    2010 12TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2010, : 231 - 235
  • [30] MASS-PRODUCTION TECHNOLOGY IN A ROLL-TO-ROLL PROCESS
    MORIMOTO, H
    IZU, M
    JAPAN ANNUAL REVIEWS IN ELECTRONICS COMPUTERS & TELECOMMUNICATIONS, 1984, 16 : 212 - 221