Two-dimensional single-shot tomography using a virtually imaged phased array and a spatial phase modulator

A virtually imaged phased array (VIPA) installed optical interferometer has been expanded to the two-dimensional (2D) tomography from the previous one-dimensional single-shot imaging technique with keeping the resolution and the measurement range. A single-shot measurement has been realized by a spatial phase modulator installed in the optical interferometer and tracing the delay time to pixel numbers on a 2D charge-coupled device (CCD) image sensor. The flexibility of the sample position was experimentally confirmed to be >25 mm, in relation to the VIPA coherency, for which the number of the interference order was confirmed to be 35. As a demonstration, a surface profile of stacked gauge blocks was observed. The repeatability of the surface position was 5 mu m for the surface profilometry. In addition, a multilayer structure was observed using a glass plate. The experimental resolution was 53 mu m when the amplified spontaneous emission light generated by the optical fiber amplifier was used for the light source. The single-shot measurement was confirmed by the 2D-CCD at a frame rate of 30 frames per second (FPS), and it provided evidence that the 2D scanless profilometry was successfully achieved using the VIPA optical device. (C) 2012 Optical Society of America