Low-temperature curing of aluminum-doped zinc oxide films assisted by ultraviolet exposure

被引：3
|
作者：
Chang, Shou-Yi [1 ]
Huang, Yi-Chung [1 ]
Chu, Hsin-Hsu [1 ]
Hsiao, Yian-Chi [1 ]
Yang, Nal-Hao [1 ]
Lin, Chia-Feng [1 ]
机构：
[1] Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 402, Taiwan
来源：
SCRIPTA MATERIALIA | 2008年 / 59卷 / 06期
关键词：
thin films; sol gel; crystallization;
D O I：
10.1016/j.scriptamat.2008.05.034
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this study, aluminum-doped zinc oxide films were prepared by a sol-gel method, followed by thermal curing at 200-500 degrees C. Prior ultraviolet exposure resulted in the subsequent curing temperature required to produce films with obvious crystallinity being successfully lowered to 200 degrees C because of the early dissociation of diethanolamine ligands in the gel precursor. The crystalline films were constructed of nanosized grains without a preferred orientation. The grain size increased from 9 to 19 nm with curing temperature. (C) 2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：646 / 648
页数：3
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