μ-Si strain gauge array on flexible substrate for dynamic pressure measurement

Low Temperature mu-Si layers have been deposited by Inductively Coupled Plasma Chemical Vapour Deposition (ICP-CVD) to produce strain gauges. These strain gauges performed on 25 mu m thick flexible Kapton Polyimide (PI) were investigated in terms of Gauge Factor but also in dynamic mode through a homemade pneumatic test bench. Best strain gauge design has been identified and subsequently used to perform a 25 sensor array which was also tested using pulses and more complex signals. A simulation of blood pressure monitoring was performed to demonstrate the value of the technology. (C) 2020 Elsevier B.V. All rights reserved.