AlGaN;
electron blocking layer (EBL);
electrostatic discharge (ESD);
GaN light-emitting diode (LED);
D O I:
10.1109/LPT.2008.924886
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
The following letter presents a study regarding GaN-based light-emitting diodes (LEDs) with p-type AlGaN electron blocking layers (EBLs) of different thicknesses. The study revealed that the LEDs could endure higher electrostatic discharge (ESD) levels as the thickness of the AlGaN EBL increased. The observed improvement in the ESD endurance ability could be attributed to the fact that the thickened p-AlGaN EBL may partly fill the dislocation-related pits that occur on the surface of the InGaN-GaN multiple-quantum well (MQW) and that are due to the strain and the low-temperature-growth process. If these dislocation-related pits are not partly suppressed, they will eventually result in numerous surface pits associated with threading dislocations that intersect the InGaN-GaN (MQW), thereby reducing the ESD endurance ability. The results of the experiment show that the ESD endurance voltages could increase from 1500 to 6000 V when the thickness of the p-AlGaN EBL in the GaN LEDs is increased from 32.5 to 130 nm, while the forward voltages and light output powers remained almost the same.
机构:
Sun Yat Sen Univ, Sch Elect & Informat Technol, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R ChinaSun Yat Sen Univ, Sch Elect & Informat Technol, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R China
Lu, Xing
Yang, Song
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机构:
Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Clear Water Bay, Hong Kong, Peoples R ChinaSun Yat Sen Univ, Sch Elect & Informat Technol, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R China
Yang, Song
Jiang, Huaxing
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机构:
Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Clear Water Bay, Hong Kong, Peoples R ChinaSun Yat Sen Univ, Sch Elect & Informat Technol, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R China
Jiang, Huaxing
Wu, Jin
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机构:
Sun Yat Sen Univ, Sch Elect & Informat Technol, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R ChinaSun Yat Sen Univ, Sch Elect & Informat Technol, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R China
机构:
S China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R China
Li, Xuna
Sun, Huiqing
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机构:
S China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R China
Sun, Huiqing
Cai, Jinxin
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机构:
S China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R China
Cai, Jinxin
Yang, Min
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S China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R China
Yang, Min
Zheng, Huan
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机构:
S China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R China
Zheng, Huan
Sun, Hao
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机构:
S China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R China
Sun, Hao
Guo, Zhiyou
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h-index: 0
机构:
S China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Lab Nanophoton Funct Mat & Device, Guangzhou 510631, Guangdong, Peoples R China
机构:
Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
Zhu, Shaoxin
Wang, Junxi
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Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
Wang, Junxi
Yan, Jianchang
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Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
Yan, Jianchang
Zhang, Yun
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Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
Zhang, Yun
Pei, Yanrong
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Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
Pei, Yanrong
Si, Zhao
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Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
Si, Zhao
Yang, Hua
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Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
Yang, Hua
Zhao, Lixia
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Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
Zhao, Lixia
Liu, Zhe
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Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
Liu, Zhe
Li, Jinmin
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Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China
机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Li, Shukun
Lei, Menglai
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Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Lei, Menglai
Lang, Rui
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机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Lang, Rui
Yu, Guo
论文数: 0引用数: 0
h-index: 0
机构:
Liuzhou Key Lab Gallium Nitride Mat & Devices, Liuzhou 545003, Guangxi, Peoples R China
Guangxi Hurricane Chip Technol Co Ltd, Qinzhou 545003, Guangxi, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Yu, Guo
Chen, Huanqing
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机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Chen, Huanqing
Wen, Peijun
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, Sch Phys Educ, Guangzhou 510641, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Wen, Peijun
Khan, Muhammad Saddique Akbar
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机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Khan, Muhammad Saddique Akbar
Meng, Linghai
论文数: 0引用数: 0
h-index: 0
机构:
Liuzhou Key Lab Gallium Nitride Mat & Devices, Liuzhou 545003, Guangxi, Peoples R China
Guangxi Hurricane Chip Technol Co Ltd, Qinzhou 545003, Guangxi, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Meng, Linghai
Zong, Hua
论文数: 0引用数: 0
h-index: 0
机构:
Liuzhou Key Lab Gallium Nitride Mat & Devices, Liuzhou 545003, Guangxi, Peoples R China
Guangxi Hurricane Chip Technol Co Ltd, Qinzhou 545003, Guangxi, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Zong, Hua
Jiang, Shengxiang
论文数: 0引用数: 0
h-index: 0
机构:
Liuzhou Key Lab Gallium Nitride Mat & Devices, Liuzhou 545003, Guangxi, Peoples R China
Guangxi Hurricane Chip Technol Co Ltd, Qinzhou 545003, Guangxi, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Jiang, Shengxiang
Hu, Xiaodong
论文数: 0引用数: 0
h-index: 0
机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
Liuzhou Key Lab Gallium Nitride Mat & Devices, Liuzhou 545003, Guangxi, Peoples R China
Guangxi Hurricane Chip Technol Co Ltd, Qinzhou 545003, Guangxi, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop Ph, Beijing 100871, Peoples R China
机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
Sino Nitride Semicond Co Ltd, Dongguan 523500, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
Jia, Chuanyu
Yu, Tongjun
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h-index: 0
机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
Yu, Tongjun
Feng, Xiaohui
论文数: 0引用数: 0
h-index: 0
机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
Feng, Xiaohui
Wang, Kun
论文数: 0引用数: 0
h-index: 0
机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
Wang, Kun
Zhang, Guoyi
论文数: 0引用数: 0
h-index: 0
机构:
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
Sino Nitride Semicond Co Ltd, Dongguan 523500, Peoples R ChinaPeking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
机构:
S China Normal Univ, Inst Optoelect Mat & Technol, Guangzhou 510631, Guangdong, Peoples R China
Guangdong Univ Technol, Expt Teaching Ctr, Guangzhou 510006, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Guangzhou 510631, Guangdong, Peoples R China
Chen Jun
Fan Guang-Han
论文数: 0引用数: 0
h-index: 0
机构:
S China Normal Univ, Inst Optoelect Mat & Technol, Guangzhou 510631, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Guangzhou 510631, Guangdong, Peoples R China
Fan Guang-Han
Pang-Wei
论文数: 0引用数: 0
h-index: 0
机构:
Guangdong Univ Technol, Expt Teaching Ctr, Guangzhou 510006, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Guangzhou 510631, Guangdong, Peoples R China
Pang-Wei
Zheng Shu-Wen
论文数: 0引用数: 0
h-index: 0
机构:
S China Normal Univ, Inst Optoelect Mat & Technol, Guangzhou 510631, Guangdong, Peoples R ChinaS China Normal Univ, Inst Optoelect Mat & Technol, Guangzhou 510631, Guangdong, Peoples R China