An infrared-bi-color Schottky-barrier CCD image sensor for precise thermal images

被引:4
|
作者
Konuma, K
Asano, Y
Masubuchi, K
Utsumi, H
Tohyama, S
Endo, T
Azuma, H
Teranishi, N
机构
[1] Sensor Research Laboratory, Microelectronics Research Laboratories, NEC Corporation, Kanagawa
关键词
D O I
10.1109/16.481729
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An infrared-bi-color image sensor was developed with a barrier height controlled Schottky-barrier photo diode array for precise temperature images. Low and high barrier height diode pixels are arranged vertically next to one another using a selective area ion implantation technique. Conventional monochrome infrared image sensor frequently give wrong temperature images due to unreasonable emmissivity assumption. The infrared-bi-color image sensor can obtain the temperature image precisely with regard to the emissivity of the object.
引用
收藏
页码:282 / 286
页数:5
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