共 50 条
Graphene interconnects fully encapsulated in layered insulator hexagonal boron nitride
被引:35
|作者:
Jain, Nikhil
[1
]
Durcan, Chris A.
[1
]
Jacobs-Gedrim, Robin
[1
]
Xu, Yang
[2
]
Yu, Bin
[1
]
机构:
[1] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12203 USA
[2] Zhejiang Univ, Inst Microelect & Optoelect, Hangzhou 310027, Zhejiang, Peoples R China
基金:
美国国家科学基金会;
关键词:
PERFORMANCE;
LIMITS;
RESISTIVITY;
DIMENSIONS;
RESISTANCE;
TRANSPORT;
NM;
D O I:
10.1088/0957-4484/24/35/355202
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
We demonstrate improvements in the electrical performance of graphene interconnects with full encapsulation by lattice-matching layered insulator, hexagonal boron nitride (h-BN). A novel layer-based transfer method is developed to assemble the top passivating layer of h-BN on the graphene surface to construct the h-BN/graphene/h-BN heterostructures. The encapsulated graphene interconnects (EGIs) are characterized and compared with graphene interconnects on either SiO2 or h-BN substrates with no top passivating h-BN layer. We observe significant improvements in both the maximum current density and breakdown voltage in EGIs. Compared with the uncovered structures, EGIs also show an appreciable increase (similar to 67%) in power density at breakdown. These improvements are achieved without degrading the carrier transport characteristics in graphene wires. In addition, EGIs exhibit a minimal environment impact, showing electrical behavior insensitive to ambient conditions.
引用
收藏
页数:5
相关论文