Graphene interconnects fully encapsulated in layered insulator hexagonal boron nitride

被引:35
|
作者
Jain, Nikhil [1 ]
Durcan, Chris A. [1 ]
Jacobs-Gedrim, Robin [1 ]
Xu, Yang [2 ]
Yu, Bin [1 ]
机构
[1] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12203 USA
[2] Zhejiang Univ, Inst Microelect & Optoelect, Hangzhou 310027, Zhejiang, Peoples R China
基金
美国国家科学基金会;
关键词
PERFORMANCE; LIMITS; RESISTIVITY; DIMENSIONS; RESISTANCE; TRANSPORT; NM;
D O I
10.1088/0957-4484/24/35/355202
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We demonstrate improvements in the electrical performance of graphene interconnects with full encapsulation by lattice-matching layered insulator, hexagonal boron nitride (h-BN). A novel layer-based transfer method is developed to assemble the top passivating layer of h-BN on the graphene surface to construct the h-BN/graphene/h-BN heterostructures. The encapsulated graphene interconnects (EGIs) are characterized and compared with graphene interconnects on either SiO2 or h-BN substrates with no top passivating h-BN layer. We observe significant improvements in both the maximum current density and breakdown voltage in EGIs. Compared with the uncovered structures, EGIs also show an appreciable increase (similar to 67%) in power density at breakdown. These improvements are achieved without degrading the carrier transport characteristics in graphene wires. In addition, EGIs exhibit a minimal environment impact, showing electrical behavior insensitive to ambient conditions.
引用
收藏
页数:5
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