Soft X-ray microscope with nanometer spatial resolution and its applications

被引：1
|
作者：
Wachulak, P. W. [1 ]
Torrisi, A. [1 ]
Bartnik, A. [1 ]
Wegrzynski, L. [1 ]
Fok, T. [1 ]
Patron, Z. [1 ]
Fiedorowicz, H. [1 ]
机构：
[1] Mil Univ Technol, Inst Optoelect, Kaliskiego 2 Str, PL-00908 Warsaw, Poland
来源：
LASER TECHNOLOGY 2016: PROGRESS AND APPLICATIONS OF LASERS | 2016年 / 10159卷
关键词：
Soft X-rays (SXR); SXR microscopy; nanometer resolution; gas puff target; optics; GAS-PUFF TARGET; WATER WINDOW MICROSCOPE; LASER-PLASMA SOURCE; COMPACT;
D O I：
10.1117/12.2259877
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A compact size microscope based on nitrogen double stream gas puff target soft X-ray source, which emits radiation in water-window spectral range at the wavelength of lambda= 2.88 nm is presented. The microscope employs ellipsoidal grazing incidence condenser mirror for sample illumination and silicon nitride Fresnel zone plate objective for object magnification and imaging. The microscope is capable of capturing water-window images of objects with 60 nm spatial resolution and exposure time as low as a few seconds. Details about the microscopy system as well as some examples of different applications from various fields of science, are presented and discussed.
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页数：8
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