Design and simulation of High Q MEMS LC-tank for oscillators

被引：2

作者：

Rahimi, Maryam ^{[1
]}

Jamuar, Sudhanshu Shekhar ^{[1
]}

Hamidon, Mohd Nizar ^{[1
]}

Ahmad, Mohd Rais ^{[2
]}

机构：

[1] Univ Putra Malaysia, Fac Engn, Dept Elect & Elect Engn, Serdang 43400, Selangor De, Malaysia

[2] MIMOS Berhad, Kuala Lumpur 57000, Malaysia

来源：

INTERNATIONAL JOURNAL OF ELECTRONICS | 2009年 / 96卷 / 04期

关键词：

LC-tank; MEMS; quality factor; inductor and varactor; SPIRAL INDUCTORS; SILICON; MICROWAVE;

D O I：

10.1080/00207210802641221

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This research focuses on the design of a high-performance MEMS LC-tank using a high Q MEMS inductor and capacitor. A two different gap varactor has been used to avoid pull-in voltage at 2.4GHz. The layout has been done by CoventorWare software. The DC voltage is 2.5v, which is applied to the plates and results of 2.04pF could be gained. The Q factor of the varactor is computed at about 557.27, which is good enough to make a low-phase noise VCO. A hollow spiral inductor with a silicon base substrate for compatibility with CMOS technology has been designed. The Greenhouse equation has been used to obtain the dimensions of the inductor. A suspended inductor has been implemented to avoid substrate coupling. The simulation has been done by CoventorWare. The Q factor of the inductor has been calculated using Yue's model. The resultant values of inductance and the Q factor at 2.4GHz, are 2.89nH and 27, respectively, which are in good agreement with the results of theoretical computation. The results were verified with the well-documented literature.

引用

页码：419 / 436

页数：18

共 50 条

[21] Analytical Model Design for LC-tank VCO in 0.18μm CMOS
Alam, Ibnul Feraji
Farhana, Nushrat
Basher, Mohammed Ashraful
2015 INTERNATIONAL CONFERENCE ON ELECTRICAL & ELECTRONIC ENGINEERING (ICEEE), 2015, : 141 - 144
[22] Substrate noise immune design of an LC-tank VCO using sensitivity functions
Soens, C
Van der Plas, G
Wambacq, P
Donnay, S
CICC: PROCEEDINGS OF THE IEEE 2005 CUSTOM INTEGRATED CIRCUITS CONFERENCE, 2005, : 477 - 480
[23] Design and simulation of variable LC tank based on MEMS technology for multi band applications
Razaghpour, Davoud
Ghasemi, Mir Majid
Fathi, Amir
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2024,
[24] High-frequency low-noise voltage-controlled LC-tank oscillators using a tunable inductor technique
Yang, Ching-Yuan
Tsai, Meng-Ting
IEICE TRANSACTIONS ON ELECTRONICS, 2006, E89C (11): : 1567 - 1574
[25] A new LC-tank voltage controlled oscillator
Li, SH
Jang, SL
Chuang, YS
Li, CF
PROCEEDINGS OF THE 2004 IEEE ASIA-PACIFIC CONFERENCE ON CIRCUITS AND SYSTEMS, VOL 1 AND 2: SOC DESIGN FOR UBIQUITOUS INFORMATION TECHNOLOGY, 2004, : 425 - 427
[26] Minimizing a Wireless Passive LC-Tank Sensor to Monitor Bladder Pressure: A Simulation Study
Melgaard, Jacob
Struijk, Johannes J.
Rijkhoff, Nico J. M.
JOURNAL OF MEDICAL AND BIOLOGICAL ENGINEERING, 2017, 37 (06) : 800 - 809
[27] A RHBD LC-Tank Oscillator Design Tolerant to Single-Event Transients
Wang, Tao
Wang, Kuande
Chen, Li
Dinh, Anh
Bhuva, Bharat
Shuler, Robert
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2010, 57 (06) : 3620 - 3625
[28] Phase noise analysis of the LC-tank CMOS oscillator
Andreani, P
22ND NORCHIP CONFERENCE, PROCEEDINGS, 2004, : 147 - 150
[29] A Clapp LC-tank injection locked frequency divider
Jang, Sheng-Lyang
Wu, Y.-J.
Lee, Chien-Feng
Juang, M.-H.
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2007, 49 (11) : 2625 - 2628
[30] Minimizing a Wireless Passive LC-Tank Sensor to Monitor Bladder Pressure: A Simulation Study
Jacob Melgaard
Johannes J. Struijk
Nico J. M. Rijkhoff
Journal of Medical and Biological Engineering, 2017, 37 : 800 - 809

← 1 2 3 4 5 →