Progress report on using magneto-strictive sputtered thin films to modify the shape of a X-ray telescope mirror

被引:0
|
作者
Ulmer, Melville P. [1 ]
Wang, Xiaoli [1 ]
Cao, Jian [1 ]
Savoie, Julia [1 ]
Bellavia, Bridget [1 ]
Graham, Michael E. [1 ]
Vaynman, Semyon [1 ]
机构
[1] Northwestern Univ, Dept Phys & Astron, Evanston, IL 60208 USA
关键词
X-ray Optics; magnetic smart materials; grazing incidence optics;
D O I
10.1117/12.924151
中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
There is a basic need both in X-ray astronomy and in synchrotron X-ray optics to be able to modify the shape of an optic via an external source of actuation. We describe a technique of shape modification that can be applied to thin walled (similar to 100-400 micron thickness) electroformed replicated optics or glass optics to improve the near net shape of the mirror as well as the mid-frequency (similar to 2-10 mm length scales) ripple. The process involves sputter deposition of a magnetic smart material (MSM) film onto a magnetically hard material (i.e., one that retains a magnetic field, e.g. the material in hard disk drives). The MSM material exhibits strains about 400 times stronger than ordinary ferromagnetic materials. The deformation process involves a magnetic write head which traverses the surface, and under the guidance of active metrology feedback, locally magnetizes the surface to impart strain where needed. We describe the results of our current progress toward our ultimate goal of improving the angular resolution of grazing incidence optics.
引用
收藏
页数:8
相关论文
共 50 条
  • [21] X-ray measurement of residual stress in patterned aluminum thin films sputtered on silicon wafers
    Tanaka, K
    Akiniwa, Y
    Inoue, K
    Ohta, H
    JSME INTERNATIONAL JOURNAL SERIES A-SOLID MECHANICS AND MATERIAL ENGINEERING, 1998, 41 (02): : 290 - 296
  • [22] Phase Identification of RF-Sputtered SnS Thin Films Using Rietveld Analysis of X-ray Diffraction Patterns
    Banai, Rona E.
    Lee, Hyeonseok
    Zlotnikov, Sivan
    Brownson, Jeffrey R. S.
    Horn, Mark W.
    2013 IEEE 39TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2013, : 2562 - 2566
  • [23] High throughput measurements of soft x-ray impurity emission using a multilayer mirror telescope
    Stutman, D.
    Tritz, K.
    Delgado-Aparicio, L.
    Finkenthal, M.
    Suliman, G.
    Roquemore, L.
    Kaita, R.
    Kugel, H.
    Johnson, D.
    Tamura, N.
    Sato, K.
    Sudo, S.
    Tarrio, C.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (10):
  • [24] Optimization of Co-sputtered FePt films using X-ray Scattering Techniques
    Basha, M. A.
    Gupta, M.
    Prajapat, C. L.
    Basu, S.
    Singh, Surendra
    62ND DAE SOLID STATE PHYSICS SYMPOSIUM, 2018, 1942
  • [25] Thickness determination of metal thin films with spectroscopic ellipsometry for x-ray mirror and multilayer applications
    Liu, C
    Erdmann, J
    Maj, J
    Macrander, A
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (05): : 2741 - 2748
  • [26] Line shape analysis of linear X-ray magnetic scattering CoPt thin films
    Chan, EVR
    MODERN PHYSICS LETTERS B, 2006, 20 (01): : 31 - 37
  • [27] Nanoresolution interface studies in thin films by synchrotron x-ray diffraction and by using x-ray waveguide structure
    Erdelyi, Z.
    Cserhati, C.
    Csik, A.
    Daroczi, L.
    Langer, GA
    Balogh, Z.
    Varga, M.
    Beke, DL
    Zizak, I.
    Erko, A.
    X-RAY SPECTROMETRY, 2009, 38 (04) : 338 - 342
  • [28] X-ray photoelectron spectroscopy characterization of radio frequency reactively sputtered carbon nitride thin films
    Kumar, S
    Butcher, KSA
    Tansley, TL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (05): : 2687 - 2692
  • [29] X-Ray photoelectron spectroscopy characterization of reactively sputtered Ti-B-N thin films
    Lu, YH
    Zhou, ZF
    Sit, P
    Shen, YG
    Li, KY
    Chen, H
    SURFACE & COATINGS TECHNOLOGY, 2004, 187 (01): : 98 - 105
  • [30] X-ray photoelectron spectroscopy investigation of magnetron sputtered Mg-Ti-H thin films
    Jensen, I. J. T.
    Thogersen, A.
    Lovvik, O. M.
    Schreuders, H.
    Dam, B.
    Diplas, S.
    INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2013, 38 (25) : 10704 - 10715