Fuzzy Fault Tree Analysis of Mask Stage

被引：0
|
作者：
Zeng, Jidong [1 ]
Ling, Dan [1 ]
Liu, Yu [1 ]
Wang, Song [1 ]
Wu, Chuanhao [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Mechatron Engn, Chengdu 610054, Peoples R China
来源：
2012 INTERNATIONAL CONFERENCE ON QUALITY, RELIABILITY, RISK, MAINTENANCE, AND SAFETY ENGINEERING (ICQR2MSE) | 2012年
关键词：
fuzzy fault tree; mask stage; membership function; fuzzy number;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Fault tree analysis (FTA) is a top-down approach for failure analysis, starting with a potential undesirable event called a TOP event, and then determining all the ways it can happen. FTA is the most commonly used technique for causal analysis in risk and reliability studies. Mask stage an important part of lithography. In this paper, Fault Tree of the mask stage is built with "Mask stage doesn't work" as the top event. Quantitative assessment and qualitative analysis based on Fuzzy Logic are carried out. And the importance of bottom events is calculated.
引用
收藏
页码：274 / 277
页数：4
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