Fully suspended slot waveguide platform

A fully suspended slot waveguide (FSSWG) platform, including straight slot waveguides, 90 degrees bends, high-Q racetrack resonators, and strip-to-slot mode converters, is demonstrated for broadband and low-loss operation in the mid-infrared spectral region. The proposed FSSWG platform has inherent merits of a broad spectral range of transparency which is limited only by the absorption of silicon, strong light-analyte interaction, good mechanical stability, and single lithography step fabrication process. By using asymmetric FSSWGs, the propagation loss, bending loss, and intrinsic optical Q factor are demonstrated to be 2.8 dB/cm, 0.15 dB/90 degrees, and 12 600, respectively. The average conversion efficiency of a mode converter is 95.4% over a bandwidth of 170 nm and 97.0% at 2231 nm. The FSSWG platform would be promising for a long-range and cavity-enhanced light-analyte interaction. Published by AIP Publishing.