Characterization of a surface-wave sustained plasma discharge in a co-axial structure

被引：0

作者：

Letout, S ^{[1
]}

Alves, LL

Boisse-Laporte, C

Leprince, P

机构：

[1] Univ Paris 11, Phys Gaz & Plasmas Lab, F-91405 Orsay, France

[2] Inst Super Tecn, Ctr Fis Plasmas, P-1049001 Lisbon, Portugal

来源：

JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS | 2005年 / 7卷 / 05期

关键词：

plasma; microwave; surface wave; electron-plasma resonance; Langmuir probe; emission spectroscopy; self-consistcnt moment method simulation;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The present work introduces the preliminary experimental characterization of a low-pressure microwave discharge in a coaxial structure, The discharge radial description is simulated using a 1D-moment method code, which couples particle and energy transport to the field distribution and Poisson's equations. Cylindrical Langmuir probe and emission spectroscopy measurements are used to give a spatial description of the high-density plasma. The effects on probe characteristics of the high-intensity resonance field are mentionned. Radial profiles are compared to numerical simulations.

引用

页码：2471 / 2475

页数：5

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