Characterization of a surface-wave sustained plasma discharge in a co-axial structure

被引：0
|
作者：
Letout, S [1 ]
Alves, LL
Boisse-Laporte, C
Leprince, P
机构：
[1] Univ Paris 11, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
[2] Inst Super Tecn, Ctr Fis Plasmas, P-1049001 Lisbon, Portugal
来源：
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS | 2005年 / 7卷 / 05期
关键词：
plasma; microwave; surface wave; electron-plasma resonance; Langmuir probe; emission spectroscopy; self-consistcnt moment method simulation;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The present work introduces the preliminary experimental characterization of a low-pressure microwave discharge in a coaxial structure, The discharge radial description is simulated using a 1D-moment method code, which couples particle and energy transport to the field distribution and Poisson's equations. Cylindrical Langmuir probe and emission spectroscopy measurements are used to give a spatial description of the high-density plasma. The effects on probe characteristics of the high-intensity resonance field are mentionned. Radial profiles are compared to numerical simulations.
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页码：2471 / 2475
页数：5
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