In-situ infrared spectroscopy for chemical analysis in electronic packaging processes

被引:0
|
作者
Niegisch, Corinna [1 ]
Haag, Sabine [1 ]
Braun, Tanja [2 ]
Hoelck, Ole [2 ]
Schneider-Ramelow, Martin [3 ]
机构
[1] Robert Bosch GmbH, Corp Sector Res & Adv Engn, Renningen, Germany
[2] Fraunhofer IZM, Dept Syst Integrat & Interconnect Technol, Berlin, Germany
[3] Tech Univ Berlin, Fac Elect Engn & Comp Sci 4, Berlin, Germany
关键词
in-situ monitoring; fourier-transform infrared spectroscopy; epoxy molding compound; local pressure molding; curing stage; EPOXY-RESIN; TEMPERATURE;
D O I
10.1109/ESTC55720.2022.9939399
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Epoxy resins are commonly used for the encapsulation of electronic components in electronic packaging processes. The chemical crosslinking process and therefore the curing of these resins during processing have a significant influence on the production and finally on the quality of the components. To follow the chemical changes during the process, a fourier-transform infrared (FT-IR) sensor was integrated into a molding press to measure in-situ infrared spectra during the process. The feasibility and reproducibility of this measurement method is presented. The spectra generated in the process show changes in absorption bands around 916 cm(-1) and 1230 cm(-1) equivalent to laboratory measurements, indicating the chemical crosslinking process. Several tests show that the repeatability of this measurement method is very good. Further, the influence of different molding temperatures on the generated infrared spectra was investigated, and no significant change in the width, intensity or shift of the bands could be detected. However, the crosslinking of the material is affected by temperature, with low temperatures leading to a slower crosslinking process. With the use of a model, it is possible to estimate the residual enthalpy of the material based on the spectra, which allows subsequent process optimization.
引用
收藏
页码:336 / 342
页数:7
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