Highly ordered self-assembled nanoscale periodic faceting in GaAs(631) homoepitaxial growth

被引:12
|
作者
Cruz-Hernandez, E. [1 ]
Shimomura, S. [2 ]
Mendez-Garcia, V. H. [1 ]
机构
[1] Univ Autonoma San Luis Potosi, Ctr Innovat & Applicat Sci & Technol CIACyT, San Luis Potosi 78210, Mexico
[2] Ehime Univ, Grad Sch Sci & Engn, Matsuyama, Ehime 7908577, Japan
关键词
MOLECULAR-BEAM EPITAXY; SEMICONDUCTOR QUANTUM-WIRE; SURFACE-MORPHOLOGY; RATIO DEPENDENCE; ATOMIC-HYDROGEN; DOT ARRAYS; GAAS; UNIFORM; DEPOSITION; ELECTRONS;
D O I
10.1063/1.4746423
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the self-assembly of large-order-correlated nanoscale faceting on GaAs(631)A substrates grown by molecular beam epitaxy. The surface morphology of the grown samples as a function of the growth temperature and the As-beam equivalent pressure was studied using atomic force microscopy. A two-dimensional autocorrelation function analysis was performed in order to quantitatively determine the uniformity of the surface corrugation. By optimizing the growth conditions, correlated faceted areas as large as 1.7 x 1.7 mu m(2) are obtained. The highly ordered surface corrugation discussed here provides useful insights to prepare highly ordered facet planes for the self organized growth of quantum wires. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4746423]
引用
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页数:4
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