Tapered SU8 Waveguide for Evanescent Sensing by Single-Step Fabrication

被引：0

作者：

Xin, Yu ^{[1
]}

Pandraud, Gregory ^{[1
]}

van Langen-Suurling, Anja ^{[2
]}

French, Paddy ^{[1
]}

机构：

[1] Delft Univ Technol, EWI, Delft, Netherlands

[2] Delft Univ Technol, Kavli Inst Nanosci, Delft, Netherlands

来源：

2017 IEEE SENSORS | 2017年

关键词：

vertical waveguide; SU8; evanescent wave; tapered; sensing;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.

引用

页码：187 / 189

页数：3

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