Tapered SU8 Waveguide for Evanescent Sensing by Single-Step Fabrication

被引：0
|
作者：
Xin, Yu [1 ]
Pandraud, Gregory [1 ]
van Langen-Suurling, Anja [2 ]
French, Paddy [1 ]
机构：
[1] Delft Univ Technol, EWI, Delft, Netherlands
[2] Delft Univ Technol, Kavli Inst Nanosci, Delft, Netherlands
来源：
2017 IEEE SENSORS | 2017年
关键词：
vertical waveguide; SU8; evanescent wave; tapered; sensing;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.
引用
收藏
页码：187 / 189
页数：3
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