Megahertz opto-mechanical modulator

被引：18
|
作者：
Marxer, C
Gretillat, MA
Jaecklin, VP
Baettig, R
Anthamatten, O
Vogel, P
机构：
[1] ESEC SA,CH-6330 CHAM,SWITZERLAND
[2] ASCOM TECH,CH-3018 BERN,SWITZERLAND
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 52卷 / 1-3期
关键词：
micromachining; modulators; opto-mechanical systems;
D O I：
10.1016/0924-4247(96)80124-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper a Fabry-Perot modulator fabricated by surface micromachining is presented. The modulator is optimized for a wavelength of 1.3 mu m and intended for fiber-in-the-loop applications. It consists of a double-supported polysilicon beam separated from an underlying polysilicon electrode by an air gap. The two polysilicon electrodes form the mirrors of the Fabry-Perot cavity, By electrostatic actuation the optical path between the mirrors can be reduced, which results in modulation of the reflectivity. Characterization of the modulator shows a maximum on-off ratio of 9 dB. The observed modulator behavior indicates a maximum modulation rate of 2.8 Mbit s(-1).
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页码：46 / 50
页数：5
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