Laser processing of sapphire by strongly focused femtosecond pulses

被引：14
|
作者：
Juodkazis, Saulius [1 ]
Misawa, Hiroaki [1 ]
机构：
[1] Hokkaido Univ, Res Inst Elect Sci, Sapporo, Hokkaido 0010021, Japan
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2008年 / 93卷 / 04期
关键词：
D O I：
10.1007/s00339-008-4763-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The high-temperature annealing (1500 degrees C for 15 min) of the shock-amorphized and compressed sapphire around the voids rendered the amorphous sapphire insoluble in aqueous solution of hydrofluoric acid. There were no observable back relaxation and reflow of the compressed amorphous phase. The overlapping of femtosecond pulses by > 70% of the focal diameter also made the photomodified regions insoluble in aqueous solution of hydrofluoric acid. Femtosecond laser cutting of hard dielectric materials is discussed.
引用
收藏
页码：857 / 861
页数：5
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