MEMS Deformable Mirrors: Technology and Applications

被引：2
|
作者：
Gupta, Amita [1 ]
Singh, R. [1 ]
Kumar, Monika Chaudhary Shailesh [1 ]
Meena, A. K. [1 ]
机构：
[1] Solid State Phys Lab, Delhi 110054, India
来源：
16TH INTERNATIONAL WORKSHOP ON PHYSICS OF SEMICONDUCTOR DEVICES | 2012年 / 8549卷
关键词：
Deformable Mirror; MEMS; Adaptive optics; micromachining; SYSTEM;
D O I：
10.1117/12.925268
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The micromachined deformable or adaptive mirrors are being used in modern optical systems for astronomical imaging, laser-based communications and biomedical imaging. Deformable mirror fabricated using MEMS technology is a low cost, compact adaptive optical element for correction of the lower order optical aberrations such as defocus & astigmatism. In this paper, important development aspects of micromachined membrane mirror are discussed. The device has been successfully fabricated and characterized for various applications.
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页数：6
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