MEMS Deformable Mirrors: Technology and Applications

被引：2
|
作者：
Gupta, Amita [1 ]
Singh, R. [1 ]
Kumar, Monika Chaudhary Shailesh [1 ]
Meena, A. K. [1 ]
机构：
[1] Solid State Phys Lab, Delhi 110054, India
来源：
16TH INTERNATIONAL WORKSHOP ON PHYSICS OF SEMICONDUCTOR DEVICES | 2012年 / 8549卷
关键词：
Deformable Mirror; MEMS; Adaptive optics; micromachining; SYSTEM;
D O I：
10.1117/12.925268
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The micromachined deformable or adaptive mirrors are being used in modern optical systems for astronomical imaging, laser-based communications and biomedical imaging. Deformable mirror fabricated using MEMS technology is a low cost, compact adaptive optical element for correction of the lower order optical aberrations such as defocus & astigmatism. In this paper, important development aspects of micromachined membrane mirror are discussed. The device has been successfully fabricated and characterized for various applications.
引用
收藏
页数：6
相关论文
共 50 条
  • [1] MEMS deformable mirrors for space and defense applications
    Bifano, T. G.
    Bierden, Paul
    Cornelissen, Steven A.
    MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE, DEFENSE, AND SECURITY II, 2008, 6959
  • [2] MEMS deformable mirrors
    Thomas Bifano
    Nature Photonics, 2011, 5 : 21 - 23
  • [3] ADAPTIVE IMAGING MEMS deformable mirrors
    Bifano, Thomas
    NATURE PHOTONICS, 2011, 5 (01) : 21 - 23
  • [4] Recent progress in technology and applications of membrane micromachined deformable mirrors
    Vdovin, G
    Sarro, PM
    Gonte, F
    Collings, N
    Dandliker, R
    HIGH-RESOLUTION WAVEFRONT CONTROL: METHODS, DEVICES, AND APPLICATIONS, 1999, 3760 : 2 - 11
  • [5] Simulation and interferometer results of MEMS deformable mirrors
    Fernandez, Bautista
    Kubby, Joel
    MEMS ADAPTIVE OPTICS II, 2008, 6888
  • [6] Wavefront control in space with MEMS deformable mirrors
    Cahoy, Kerri L.
    Marinan, Anne D.
    Novak, Benjamin
    Kerr, Caitlin
    Webber, Matthew
    MEMS ADAPTIVE OPTICS VII, 2013, 8617
  • [7] MEMS Deformable Mirrors for Astronomical Adaptive Optics
    Cornelissen, S. A.
    Hartzell, A. L.
    Stewart, J. B.
    Bifano, T. G.
    Bierden, P. A.
    ADAPTIVE OPTICS SYSTEMS II, 2010, 7736
  • [8] Modeling of Deformable MEMS Mirrors in Modern Telescopes
    Kumar, Tripurari S.
    Banavar, Ravi N.
    2012 INTERNATIONAL CONFERENCE ON FIBER OPTICS AND PHOTONICS (PHOTONICS), 2012,
  • [9] MEMS deformable mirrors in astronomical adaptive optics
    Bifano, T.
    Cornelissen, S.
    Bierden, P.
    1ST AO4ELT CONFERENCE - ADAPTIVE OPTICS FOR EXTREMELY LARGE TELESCOPES, 2009,
  • [10] Segmented MEMS deformable-mirror technology for space applications
    Helmbrecht, Michael A.
    Juneau, Thor
    Hart, Matthew
    Doble, Nathan
    MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE APPLICATIONS, 2006, 6223
12345