Digital twin-driven intelligent production line for automotive MEMS pressure sensors

The equipment and technological processes used in manufacturing electronic products are gradually being automated and networked. Currently, digital twin technology continues to evolve and mature. The electronics manufacturing industry is undergoing an intelligent and digital transformation. Micro-electro-mechanical system (MEMS) sensors have been widely used in the automotive field due to their small size, low cost, and high reli-ability. In this study, a new intelligent production line for automotive MEMS pressure sensors driven by digital twin is individually designed. The intelligent production line system consists of physical production lines, digital production lines, twin data, and data service systems. The technology of multi-source heterogeneous data acquisition is used to process and analyze data collected in real time in a physical production line. Based on the technology of parallel control, the physical and digital production lines are synchronized. To obtain optimal process parameters, a process database is established through the analysis of the key processes of the production line. Three types of automotive MEMS pressure sensors are successfully manufactured in the constructed digital twin-driven intelligent production line. The intelligent production line can realize 24-h unattended operation. The product yield is above 98 %, and the takt time is less than 16 s.