FULL SYSTEM FOR PIEZOELECTRIC ORGANIC MEMS RESONATORS OPERATING IN LIQUID MEDIA

被引：0

作者：

Ducrot, Pierre-Henri ^{[1
]}

Dufour, Isabelle ^{[1
]}

Nicu, Liviu ^{[2
]}

Mathieu, Fabrice ^{[2
]}

Ayela, Cedric ^{[1
]}

机构：

[1] Bordeaux Univ, IMS Lab, CNRS UMR 5218, Bordeaux INP, Bordeaux, France

[2] Toulouse Univ, LAAS, CNRS UPR 8001, Toulouse, France

来源：

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年

关键词：

Organic Piezoelectric MEMS; Measuring System; Liquid Media; Resonance Frequency; Viscosity; VISCOSITY;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Here is presented a full compact system enabling the integrated actuation and measurement of the resonance frequency of piezoelectric organic MEMS resonators in liquid media. The resonators contain a piezoelectric layer made of PVDF-TrFE for both the actuation and the read-out of the MEMS. They are included into a watertight enclosure associated with a PCB and a dedicated electronic card, allowing electrical measurements in air and liquid media. An application for viscosity measurements of water/glycerol mixtures is presented and shows that results match with measurements made with a viscometer, without any knowledge of the mass density.

引用

页码：1372 / 1375

页数：4

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