Silicon Nitride Horizontal Air-Slot Microdisk Resonators With a Nanocrystal Si Emitting Layer

被引：3
|
作者：
Lee, Shinyoung [1 ]
Shin, Jung H. [1 ,2 ]
机构：
[1] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea
[2] Korea Adv Inst Sci & Technol, Grad Sch Nanosci & Technol WCU, Taejon 305701, South Korea
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2013年 / 25卷 / 11期
基金：
新加坡国家研究基金会;
关键词：
Microresonators; nanocrystals; Biosensors; WHISPERING-GALLERY MODES; LABEL-FREE; ON-INSULATOR; WAVE-GUIDE; LIGHT; EMISSION; LASERS; RING;
D O I：
10.1109/LPT.2013.2258333
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Silicon nitride (SiN) microdisk resonators with a 40-nm horizontal air slot and a nanocrystal Si (nc-Si) emitting top layer are investigated. The whole structure is fabricated using only a single deposition and lithography step, with the light-emitting layer self-aligned to excite the slot-mode within the air slot. The nc-si are excited via top-pumping using a UV laser diode, and the visible light emission from nc-Si is coupled into the whispering gallery mode (WGM) with the light concentrated in the air slot. The WGM resonances are observed via side-photoluminescence setup using a Si charge-coupled device. The feasibility of applying this structure as a biosensor is demonstrated, with an estimated surface sensitivity of 2.8 nm/nm.
引用
收藏
页码：1020 / 1023
页数：4
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