A monolithic integrated pressure sensor

被引：0
|
作者：
Zhang, Zhengyuan [1 ]
Yang, Cao
Mei, Yong
Feng, Zhicheng
Li, Xiaogang
Li, Jiangen
Hu, Guoxiang
机构：
[1] Natl Lab Analog Integrated Circuits, Chongqing 400060, Peoples R China
来源：
MICRO-NANO TECHNOLOGY XIII | 2012年 / 503卷
关键词：
pressure sensor; CrSi resistor networks; temperature compensation;
D O I：
10.4028/www.scientific.net/KEM.503.8
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this paper, focused on especial requirement monolithic integrated resistance pressure sensor, pressure structure, signal processing circuits and process compatible technology of sensor and IC were studied. The feebleness pressure signal monitoring circuits was designed, high precision CrSi resistor networks was used for temperature compensation of resistance pressure sensor, and a monolithic integrated pressure sensor only 2.3 X 2.3mm(2) was obtained. The measuring results are as follows, measurement range is 5-115kPa, the maximum Vout is more than 4.5V, sensitivity is 1.2%.
引用
收藏
页码：8 / +
页数：2
相关论文
共 50 条
  • [31] Integrated Optical and Electronic Pressure Sensor
    Padron, Ivan
    Fiory, Anthony T.
    Ravindra, Nuggehalli M.
    IEEE SENSORS JOURNAL, 2011, 11 (02) : 343 - 350
  • [32] A BIPOLAR INTEGRATED SILICON PRESSURE SENSOR
    LEE, MK
    LEE, BN
    JUNG, SM
    SENSORS AND ACTUATORS A-PHYSICAL, 1992, 34 (01) : 1 - 7
  • [33] Temperature compensating an integrated pressure sensor
    Paillard, B.
    Sensors (Peterborough, NH), 1998, 15 (01): : 36 - 37
  • [34] A monolithic light scattering particle CMOS sensor for integrated optics application
    Yang, An
    Zhang, Zitong
    Jiang, Yanfeng
    MICROELECTRONICS JOURNAL, 2023, 139
  • [35] Optimal Design and Control Simulation of a Monolithic Piezoelectric Microactuator with Integrated Sensor
    Moussa, Roba El Khoury
    Grossard, Mathieu
    Chaillet, Nicolas
    Boukallel, Mehdi
    Hubert, Arnaud
    2010 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), 2010,
  • [36] GaAs monolithic integrated microwave power sensor in coplanar waveguide technology
    Dehe, A
    Klingbeil, H
    Krozer, V
    Fricke, K
    Beilenhoff, K
    Hartnagel, HL
    MONOLITHIC CIRCUITS SYMPOSIUM, DIGEST OF PAPERS, 1996, : 179 - 182
  • [37] Readout characteristics of integrated monolithic InGaAs active pixel sensor array
    Kim, Q
    Cunningham, TJ
    Pain, B
    Lange, MJ
    Olsen, GH
    OPTOELECTRONIC INTEGRATED CIRCUITS II, 1997, 3290 : 278 - 286
  • [38] Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor
    Omidbeike, Meysam
    Teo, Yik R.
    Yong, Yuen K.
    Fleming, Andrew J.
    IFAC PAPERSONLINE, 2017, 50 (01): : 10913 - 10917
  • [39] GaAs monolithic integrated microwave power sensor in coplanar waveguide technology
    Dehe, A
    Klingbeil, H
    Krozer, V
    Fricke, K
    Beilenhoff, K
    Hartnagel, HL
    1996 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 1996, : 161 - 164
  • [40] Monolithic-Integrated GaN Optical Sensor to Detect the Adulterated Honey
    Chen, Jian
    Chen, Tingxuan
    Xie, Yuelin
    Zhu, Ling
    2021 OPTOELECTRONICS GLOBAL CONFERENCE (OGC 2021), 2021, : 202 - 204
12345