Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser

被引：8
|
作者：
Zhang, Chenchu [1 ]
Zhang, Jianming [1 ]
Chen, Renfei [1 ]
Li, Jiawen [2 ]
Wang, Chaowei [2 ]
Cao, Rui [3 ]
Zhang, Jingjing [4 ]
Ye, Hanchang [1 ]
Zhai, Hua [1 ]
Sugioka, Koji [5 ]
机构：
[1] Hefei Univ Technol, Inst Ind & Equipment Technol, Anhui Prov Key Lab Aerosp Struct Parts Forming Te, Hefei 230009, Peoples R China
[2] Univ Sci & Technol China, CAS Key Lab Mech Behav & Design Mat, Hefei 230026, Peoples R China
[3] CALTECH, Caltech Opt Imaging Lab, Andrew & Peggy Cherng Dept Med Engn, Pasadena, CA 91125 USA
[4] Anhui Univ, Sch Math Sci, Hefei 230601, Peoples R China
[5] RIKEN, Ctr Adv Photon, 2-1 Hirosawa, Wako, Saitama 3510198, Japan
来源：
OPTICS LETTERS | 2020年 / 45卷 / 14期
基金：
中国国家自然科学基金;
关键词：
FEATURES;
D O I：
10.1364/OL.397078
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Femtosecond-laser-induced two-photon polymerization has distinct advantages in micro-nanofabrication due to its intrinsic three-dimensional processing capability and. high precision with sub-100 nanometer fabrication resolution. However, the high resolution causes a drawback in fabricating large-scale structures due to unacceptably long processing times. To solve this problem, we applied the patterned focus as the basic element for scanning processing. Theoretically, the relationship between patterned-focus scanning parameters and the uniformity of scanned light field was analyzed and optimized. Experimentally, we quantitatively investigated the relationship between the microstructure surface quality and the parameters of patterned-focus scanning. Based on above, we put forward a hybrid method that combines the femtosecond. laser patterned exposure with direct-writing fabrication to rapidly fabricate large-scale microfluidic devices for various practical applications. (C) 2020 Optical Society of America
引用
收藏
页码：3925 / 3928
页数：4
相关论文
共 50 条
  • [11] Recurrent Multi-scale Transformer for High-Resolution Salient Object Detection
    Deng, Xinhao
    Zhang, Pingping
    Liu, Wei
    Lu, Huchuan
    PROCEEDINGS OF THE 31ST ACM INTERNATIONAL CONFERENCE ON MULTIMEDIA, MM 2023, 2023, : 7413 - 7423
  • [12] Learning a Dynamic High-Resolution Network for Multi-Scale Pedestrian Detection
    Ding, Mengyuan
    Zhang, Shanshan
    Yang, Jian
    2020 25TH INTERNATIONAL CONFERENCE ON PATTERN RECOGNITION (ICPR), 2021, : 9076 - 9082
  • [13] EfficientViT: Lightweight Multi-Scale Attention for High-Resolution Dense Prediction
    Cai, Han
    Li, Junyan
    Hu, Muyan
    Gan, Chuang
    Han, Song
    2023 IEEE/CVF INTERNATIONAL CONFERENCE ON COMPUTER VISION (ICCV 2023), 2023, : 17256 - 17267
  • [14] MTPose: Human Pose Estimation with High-Resolution Multi-scale Transformers
    Rui Wang
    Fudi Geng
    Xiangyang Wang
    Neural Processing Letters, 2022, 54 : 3941 - 3964
  • [15] High-resolution prediction of seasalt transportation by multi-scale weather simulation
    Onishi, Ryo
    Matsuda, Keigo
    Suto, Hitoshi
    Hattori, Yasuo
    Hirakuchi, Hiromaru
    Matsunami, Shigeyuki
    Yagyu, Shinjiro
    Shinohara, Tadashi
    Katayama, Hideki
    Zairyo to Kankyo/ Corrosion Engineering, 2021, 69 (06): : 169 - 174
  • [16] MTPose: Human Pose Estimation with High-Resolution Multi-scale Transformers
    Wang, Rui
    Geng, Fudi
    Wang, Xiangyang
    NEURAL PROCESSING LETTERS, 2022, 54 (05) : 3941 - 3964
  • [17] A high-resolution multi-scale industrial water use dataset in China
    Meng Li
    Yuan Tong
    Junming Zhu
    Shuntian Xu
    Scientific Data, 11 (1)
  • [18] A multi-scale high-resolution analysis of global sea surface temperature
    Chin, Toshio Michael
    Vazquez-Cuervo, Jorge
    Armstrong, Edward M.
    REMOTE SENSING OF ENVIRONMENT, 2017, 200 : 154 - 169
  • [19] Efficient Multi-Scale Stereo of High-Resolution Planar and Spherical Images
    Brunton, Alan
    Lang, Jochen
    Dubois, Eric
    SECOND JOINT 3DIM/3DPVT CONFERENCE: 3D IMAGING, MODELING, PROCESSING, VISUALIZATION & TRANSMISSION (3DIMPVT 2012), 2012, : 120 - 127
  • [20] CHANGE DETECTION FOR HIGH-RESOLUTION REMOTE SENSING IMAGERY BASED ON MULTI-SCALE SEGMENTATION AND FUSION
    Guo, Qingle
    Zhang, Junping
    Li, Tong
    Lu, Xiaochen
    2017 IEEE INTERNATIONAL GEOSCIENCE AND REMOTE SENSING SYMPOSIUM (IGARSS), 2017, : 1919 - 1922
12345