Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser

被引：8

作者：

Zhang, Chenchu ^{[1
]}

Zhang, Jianming ^{[1
]}

Chen, Renfei ^{[1
]}

Li, Jiawen ^{[2
]}

Wang, Chaowei ^{[2
]}

Cao, Rui ^{[3
]}

Zhang, Jingjing ^{[4
]}

Ye, Hanchang ^{[1
]}

Zhai, Hua ^{[1
]}

Sugioka, Koji ^{[5
]}

机构：

[1] Hefei Univ Technol, Inst Ind & Equipment Technol, Anhui Prov Key Lab Aerosp Struct Parts Forming Te, Hefei 230009, Peoples R China

[2] Univ Sci & Technol China, CAS Key Lab Mech Behav & Design Mat, Hefei 230026, Peoples R China

[3] CALTECH, Caltech Opt Imaging Lab, Andrew & Peggy Cherng Dept Med Engn, Pasadena, CA 91125 USA

[4] Anhui Univ, Sch Math Sci, Hefei 230601, Peoples R China

[5] RIKEN, Ctr Adv Photon, 2-1 Hirosawa, Wako, Saitama 3510198, Japan

来源：

OPTICS LETTERS | 2020年 / 45卷 / 14期

基金：

中国国家自然科学基金;

关键词：

FEATURES;

D O I：

10.1364/OL.397078

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Femtosecond-laser-induced two-photon polymerization has distinct advantages in micro-nanofabrication due to its intrinsic three-dimensional processing capability and. high precision with sub-100 nanometer fabrication resolution. However, the high resolution causes a drawback in fabricating large-scale structures due to unacceptably long processing times. To solve this problem, we applied the patterned focus as the basic element for scanning processing. Theoretically, the relationship between patterned-focus scanning parameters and the uniformity of scanned light field was analyzed and optimized. Experimentally, we quantitatively investigated the relationship between the microstructure surface quality and the parameters of patterned-focus scanning. Based on above, we put forward a hybrid method that combines the femtosecond. laser patterned exposure with direct-writing fabrication to rapidly fabricate large-scale microfluidic devices for various practical applications. (C) 2020 Optical Society of America

引用

页码：3925 / 3928

页数：4

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