Wideband Visible Wavelength Range MEMS Fabry-Perot Tunable Filter With Highly Accurate Calibration System

被引：15
|
作者：
Hirokubo, Nozomu [1 ]
Komatsu, Hiroshi [1 ]
Hashimoto, Nobuaki [1 ]
Sonehara, Makoto [2 ]
Sato, Toshiro [2 ]
机构：
[1] Seiko Epson Corp, Core Technol Dev Ctr, Fujimi, Gunma 3990295, Japan
[2] Shinshu Univ, Fac Engn, Nagano 3908621, Japan
来源：
IEEE SENSORS JOURNAL | 2013年 / 13卷 / 08期
关键词：
Optical filters; electrostatic actuators; nanopositioning; optical device fabrication; INTERFEROMETER;
D O I：
10.1109/JSEN.2013.2264458
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel microelectromechanical systems (MEMS) Fabry-Perot tunable filter (FPTF) and calibration system for accurately controlling the wavelength of the transmission peak in the wide wavelength range of visible light are reported. The MEMS FPTF consists of a Fabry-Perot filter having Ag alloy mirrors, an electrostatic actuator, and a capacitive gap sensor. The calibration system consists of the capacitive gap sensor, a capacitance measurement circuit, and a voltage controller. Through introducing the calibration system to MEMS FPTF, wavelength accuracy of more than +/- 1 nm is achieved. This is the accuracy level required for high-accuracy spectrum measurement in the range from 400 to 700 nm.
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页码：2930 / 2936
页数：7
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