Electro-optical characterization of h-BN thin film waveguides by prism coupling technique

被引：9
|
作者：
Boudiombo, J
Loulergue, JC
Bath, A
Thevenin, P
机构：
[1] Univ Metz & Supelec, CLOES, Lab Mat Opt Proprietes Specif, F-57078 Metz 03, France
[2] Univ Metz & Supelec, CLOES, Lab Interfaces Composants & Microelect, F-57078 Metz, France
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1999年 / 59卷 / 1-3期
关键词：
thin film; waveguides; electro-optic; boron nitride; plasma enhanced chemical vapor deposition;
D O I：
10.1016/S0921-5107(98)00375-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Waveguides were fabricated by deposition of boron nitride thin films onto glass substrates by a microwave plasma enhanced chemical vapor deposition (PECVD) process. We have characterized the optical linear properties of the as-deposited layers by m-lines spectroscopy. We have used a simple method based on the shift of the synchronous angles of the guided modes to investigate the electro-optic tensor r(ij) using co-planar electrodes. With TM polarized light the value of r(eff) computed is of the order of 5 pm V-1. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：244 / 247
页数：4
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