Effects of temperature on ZnO hybrids grown by metal-organic chemical vapor deposition

被引：5

作者：

Kim, A-Young ^{[1
]}

Fang, Samseok ^{[1
]}

Lee, Do Han ^{[1
]}

Yim, So Young ^{[1
]}

Byun, Dongjin ^{[1
]}

机构：

[1] Korea Univ, Seoul 136713, South Korea

来源：

MATERIALS RESEARCH BULLETIN | 2012年 / 47卷 / 10期

关键词：

Nanostructures; Oxides; Thin films; Epitaxial growth; Vapor deposition; MICROCRYSTALLITE THIN-FILMS; ROOM-TEMPERATURE; SAPPHIRE; GAN;

D O I：

10.1016/j.materresbull.2012.04.099

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure and temperature. Vertically aligned ZnO nanorods were grown on c-plane of sapphire substrate at 600 degrees C and 400 Torr. ZnO film was then formed in situ on the ZnO nanorods at 100, 600, and 700 degrees C and 10 Torr. High-resolution X-ray diffraction measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 3-5 mu m by field-emission scanning electron microscopy. The hybrid formed at 600 degrees C showed better crystalline quality those formed at 100 C or 700 degrees C. These structures have potential applicability as nanobuilding blocks in nanodevices. Published by Elsevier Ltd.

引用

页码：2888 / 2890

页数：3

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