High-resolution fiber-coupled interferometric point sensor for micro- and nano-metrology

被引：10
|
作者：
Schake, Markus [1 ]
Schulz, Markus [1 ]
Lehmann, Peter [1 ]
机构：
[1] Univ Kassel, Dept Elect Engn, Chair Measurement Technol, D-34109 Kassel, Germany
来源：
TM-TECHNISCHES MESSEN | 2015年 / 82卷 / 7-8期
关键词：
Fiber-sensor; interferometry; micro optical probe head; roughness measurement; path length modulation; dual wavelength;
D O I：
10.1515/teme-2015-0006
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The determination of surface roughness is a common challenge in industrial quality assurance. Because tactile techniques like the stylus method or atomic force microscopy run the risk of damaging the measurement object there is a high demand for contact-free optical measurements. In this contribution we demonstrate the feasibility of a high resolution fiber-coupled interferometric point sensor with periodical path length modulation to determine the surface profile of rough surfaces. Measurements on two specimens characterized by different roughness parameters are presented and corrections for common measurement errors, due to phase ambiguity are discussed.
引用
收藏
页码：367 / 376
页数：10
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