High-sensitivity accelerometer based on cold emission principle

被引：3
|
作者：
Shashkin, VI
Vostokov, NV
Vopilkin, EA
Klimov, AY
Volgunov, DG
Rogov, VV
Lazarev, SG
机构：
[1] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod 603950, Russia
[2] Russian Fed Nucl Ctr, RFNC VNIIEF, Sarov, Russia
来源：
IEEE SENSORS JOURNAL | 2004年 / 4卷 / 02期
关键词：
accelerometer; cold emission; electrode geometry;
D O I：
10.1109/JSEN.2004.823683
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A possibility for fabrication of a high-sensitivity accelerometer is considered. The linear acceleration of a sensor causes displacement of the proof mass electrode. The displacement detector is based on a strong dependence of the tunneling or cold emission current on the gap between the electrodes. The geometry of the electrodes that provides the best sensitivity is determined. The accelerometer with tunneling-emission electrodes is fabricated. At frequencies up to 5 kHz the resolution reaches 10(-4) g/Hz(1/2) in the tunneling mode and 10(-3) g/Hz(1/2) in the emission mode.
引用
收藏
页码：211 / 215
页数：5
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