Enhancement of electron emission characteristics of platform-shaped Mo emitters by diamond-like carbon coatings

被引：3
|
作者：
Lin, CM
Chang, SJ
Yokoyama, M
Lin, IN
Chuang, FY
Tsai, CH
Wang, WC
机构：
[1] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[2] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 300, Taiwan
[3] ITRI, Elect Res & Serv Org, Hsinchu 300, Taiwan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 6A期
关键词：
diamond-like carbon; pulsed laser deposition; platform emitter;
D O I：
10.1143/JJAP.38.3700
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effect of diamond-like carbon (DLC) films coated by the pulsed laser deposition technique on the electron field emission characteristics of platform-shaped Mo emitters was investigated. It was observed that DLC coatings can significantly enhance electron emission. The gate-to-cathode operating voltage(for an anode current density of 1 mA/cm(2)) was lowered from 50 V for uncoated platform-shaped Mo emitters to 20 V for DLC-coated platform-shaped Mo emitters. The lifetime bf the DLC-coated emitters is at least twice that of the uncoated ones. Moreover, the DLC-coated platform-shaped Mo emitters, exhibited durability superior to that of the DLC-coatect Spindt-type emitters, which was due to the abundance of emission sites in the platform-shaped Mo emitters.
引用
收藏
页码：3700 / 3704
页数：5
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