Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers

被引：0

作者：

Isobe, Atsushi ^{[1
]}

Kamada, Yudai ^{[1
]}

Oshima, Takashi ^{[1
]}

Furubayashi, Yuki ^{[1
]}

Sakuma, Noriyuki ^{[1
]}

Takubo, Chisaki ^{[1
]}

Tainaka, Yasushi ^{[2
]}

Watanabe, Keiki ^{[2
]}

Sekiguchi, Tomonori ^{[1
]}

机构：

[1] Hitachi Ltd, Res & Dev Grp, Tokyo, Japan

[2] Hitachi Ltd, Syst & Serv Business Div, Yokohama, Kanagawa, Japan

来源：

2018 IEEE SENSORS | 2018年

关键词：

accelerometer; MEMS; noise; power consumption;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A method is presented for designing a thick membrane with several thousand perforations suitable for low-noise capacitive micro-electro-mechanical systems (MEMS) accelerometers. Although a membrane with two-step perforations shows good noise density performance, it is difficult to simulate mechanical noise using the conventional method because there are too many perforations, which makes the structure of the membrane complicated. The proposed method is based on the assumption that the number of perforations is infinite and that there are symmetric planes between the perforations. This assumption greatly reduces computational complexity because the simulation model is simplified in the region around a perforation. We fabricated MEMS resonators with a two-step perforated membrane and evaluated the accuracy of the simulation results. The measured Q values of the fabricated resonators were in good agreement with the calculated results. Using this design method, we optimized the structure of a membrane with two-step perforations and fabricated a capacitive MEMS accelerometer. It showed excellent low-noise density (less than 15 ng/Hz(1/2)).

引用

页码：312 / 315

页数：4

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