Anodic oxide films (AOF) on neat titanium and on alloys of the Ti-Al system (Ti-10 at. % Al, Ti-24 at. % Al, Ti-50 at. % Al, Ti-75 at. % Al) formed in borate buffer solution are studied by ellipsometry. A model is proposed, which adequately describes the shape of the alloy surface with and without AOF The model takes into account the roughness factor, allowing one to more correctly determine optical parameters of AOF and dependence of its thickness on anodic potential. It is found that the alloy surface roughness is effectively smoothed with increasing applied potential.