Template-induced coherent growth and mechanical properties of ZrO2/TiN nano-multilayers

被引:24
|
作者
Yue, Jianling [1 ]
Liu, Yan [2 ]
Li, Geyang [2 ]
机构
[1] Shanghai Maritime Univ, Inst Marine Mat Sci & Engn, Shanghai 200135, Peoples R China
[2] Shanghai Jiao Tong Univ, State Key Lab Met Matrix Composites, Shanghai 200030, Peoples R China
关键词
Sputtering; Multilayer thin films; Crystal growth; Microstructure; Hardness; SUPERLATTICES; HARDNESS; FILMS; STRESS;
D O I
10.1016/j.scriptamat.2008.10.019
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
ZrO2/TiN nano-multilayers with various TiN layer thicknesses were synthesized. Studies reveal that the Usual rocksalt structure of TiN at very low thickness (<similar to 1.8 nm) is transformed into a pseudocrystal, with the same structure as tetragonal ZrO2 and grows coherently with ZrO2 layers. As the thickness of the TiN layer increases further, TiN gradually grows into rocksalt structure, blocking the coherent growth of multilayers. The superhardness effect was not obtained in ZrO2/TiN nano-multilayers, since the coherent strains in multilayers could reduce the modulus difference between their constituents. (C) 2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:240 / 243
页数:4
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