Preparation and mechanical properties of TiN/AlN nano multilayers

被引：0
|
作者：
Li, Geyang [1 ]
Shi, Xiaorong [1 ]
Zhang, Liuqiang [1 ]
Wu, Liang [1 ]
Li, Pengxing [1 ]
机构：
[1] Shanghai Jiaotong Univ, Shanghai, China
来源：
Shanghai Jiaotong Daxue Xuebao/Journal of Shanghai Jiaotong University | 1999年 / 33卷 / 02期
关键词：
Mechanical properties - Microhardness - Multilayers - Nanostructured materials - Sputtering;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
TiN/AlN nano-multilayers were fabricated by using multi-target reactive sputtering method. The microstructure and hardness of nano-multilayers were detected by XRD, TEM and microindentor respectively. The results show that the modulated interface of nano multilayers prepared in this way is smooth and clear; the hardness of TiN/AlN nano-multilayers increases with the decrease of wavelength A and the maximum hardness reaches HK32.93 GPa at A=2 nm.
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页码：159 / 161
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