Low Frequency Arc-Based MEMS Structures for Vibration Energy Harvesting

This study reports the novel arc-based cantilevers for reducing the natural frequency of MEMS cantilever beams without the addition of tip/point mass. The results show an increased potential for energy extraction from naturally occurring vibration sources. An analytical model was used to model the effective mechanical properties of multilayered MEMS cantilevers while the natural frequencies were obtained by applying a finite element code. Results were obtained for two geometries of arc-based cantilevers as well as their linear counterparts. These results demonstrate that arc-based cantilevers vibrate at frequencies significantly lower than their linear components (up to 40% reduction in natural frequency).